SEMICONDUCTOR & INDUSTRIAL OZONE MONITORING
Ozone Gas Analyzers for Semiconductor Process Monitoring
Explore Zetron UV absorption analyzers for continuous ozone concentration measurement. Start with the MIC500-OZ, then match the range, sampling conditions and outputs to your process.
FEATURED ANALYZER
MIC500-OZ wall-mounted UV ozone gas analyzer
A gas concentration analyzer with automatic zero calibration, temperature and pressure compensation, and a 5-inch touchscreen. RS-485 Modbus RTU and active 4–20 mA outputs support connection to compatible monitoring systems.
Range options
Standard 0–300 g/Nm³. Alternative configurations: 0–200, 0–100 or 0–50 g/Nm³, and 0–1000 ppm.
Measurement and display
Dual-path UV absorption with an LED light source. Ozone concentration, temperature and pressure display. Optional 7-inch touchscreen.
Installation
Wall-mounted IP65 enclosure. Positive-pressure sampling, with an optional negative-pressure arrangement.
Choose the right measurement
Ozone Gas Analyzers
Compare wall-mounted, compact, rack-mounted and benchtop models for ozone generator output and industrial gas monitoring.
Dissolved Ozone Analyzers
Review the OZ-150W, OZ-180W and OZ-300W families for ozone in water. Select for the liquid composition, range and sampling arrangement.
Applications
Semiconductor projects
Review the gas composition, concentration range and operating conditions for the intended measurement point.
Ozone generator monitoring
Measure outlet gas concentration with a range and sample arrangement matched to the generator.
Water and industrial processes
Explore gas and dissolved ozone measurement for treatment systems, process water and industrial applications.
Discuss your measurement requirements
Send your target range, sample conditions, installation format and required outputs.